eTraining Introduction How to Use This Module Introduction Choosing the Preparation Method Mount Fabrication Procedure Steel Etching Procedure Steel Polishing Procedure Rocks and Minerals Equipment Procedure Introduction Jet Spraying Lofting Suspension Odd Shapes - Fractures Cryo Fracture Technique Electronic Materials and Carbon Nanotubes Multiprep Polishing Procedure Handling Specimen Coating Reasons for Coating Metal Coating Procedure Carbon Coating Procedure Introduction Specimen Holders by Instrument Overview Interactive Parts Tour Operating Procedures Overview Chemicals and Materials Solution Preparation Chemical Calculations Fixation and Dehydration Mounting Safety and Disposal References Form and Function Signal Source and Detection Interactive Parts Tour Interactive Cutaway Tour Safety Procedures Operating Procedures Basic Imaging Advanced Imaging Shut Down FAQs Troubleshooting VIDEO: Specimen Loading Technique VIDEO: Start Up Technique VIDEO: Specimen Unloading Technique Form and Function 1 Form and Function 2 Chemical Analysis Interactive Parts Tour Interactive Cutaway Tour Software Tour Safety Procedures Preliminary Specimen Exchange Flashing Imaging Shut Down Backscatter Imaging Charging Specimen Types X-Ray Spectral Analysis X-Ray Mapping Why Use FESEM? Specimen Constraints General FAQs Troubleshooting X-Rays and Spectra Energy Dispersive Spectrometer Wavelength Dispersive Spectrometer Safety Procedures EDS Versus WDS Quantitative X-Ray Microanalysis Basic Science Interactive X-Ray Mapping Challenge FAQs Troubleshooting Overview Tapping Mode Laser Alignment Preliminary Alignment Operation Image Viewing/Offline Operation Shut Down System Requirements Alternative Content Contact General Lab Safety Disclaimers Usage Permissions Site Map

Imaging

Beam Current

NOTE: You will periodically need to re-set the beam current. To do so, click on the Set icon in the Accelerating Voltage window. Check to ensure the beam current is around 10 ľA at 15 minutes into your session and again at 45 minutes into your session.

Voltage Set

Beam current (Ie) becomes more stable over time as contamination is spread evenly over the surface of the emission tip.

Alignment and Stigmation

The following demos are used in Operation Step 8.

FESEM Alignment Demo FESEM Stigmation Demo

Operation

1. If you are the first user of the day, then peform the flashing procedure. See Flashing under Operating Procedures in Hitachi S-4700 FE-SEM. If you do not need to flash, select an operating voltage by clicking in the top right Accelerating Voltage window. VIEW
2. An HV Control dialogue box will appear. Select the desired accelerating voltage. Click ON. VIEW
Column Icon3. Click on the Column Set Up icon and select an operation mode. You can also select a working distance and which detector(s) you want to use. Once you have chosen a working distance, manually adjust the WD until the image on the screen is in focus. VIEW
4. Once the operating conditions have been selected, roughly focus the image.    
5. To find an area of interest, select Low Magnification mode. Do this by clicking on the H/L icon to switch between high and low magnification. VIEW
Alignment Icon6. If you find that the image shifts locations when you change modes, select a large, distinguishable feature under high mag mode. Then, switch to low mag mode and click the Alignment icon. Select low magnification adjustment and use the Alignment/Stigmation controls to move the feature into the cross hairs. Select Off in the alignment box and close the window. VIEW
7. Move to the area you want to image and focus.    
Alignment Icon8. Once you have focused, click on the Alignment icon. For all alignments, use the Alignment/Stigmation controls on the control panel. VIEW
8.1. Start with Beam Align. A target will appear. Using the knobs, move the beam to the center of the "bulls-eye".
8.2. Next, select Aperture Align. Eliminate any shift in the window using the knobs. It is easiest to adjust so that the image shifts only in one direction (x or y). Use a magnification where you can easily see the shifting and adjust. Then move to a higher magnification and repeat. VIEW THE ALIGNMENT DEMO
8.3. Click on Stig Align X and Stig Align Y. Adjust as above, but these often do not need to be changed! VIEW THE STIGMATION DEMO
8.4. Close the window.
9. When the area of interest is identified and the correct working distance and tilt setting are selected, lock the stage. NOTE: DO NOT CHANGE THE WORKING DISTANCE WHILE STAGE LOCK IS ON. You may need to find your location again, then refocus and stigmate. Wait a few seconds until the image stops drifting. VIEW
10. Once you are satisfied with the image, check that the beam current is at least 8 ľA. If not, click the SET icon to the upper left of the voltage box. VIEW
Auto Brightness and Contrast Icon11. Click on the Auto Brightness and Contrast icon. You may want to manually change the image after doing this.    
Image Icon12. When you are ready to capture an image, click on the Image Set Up icon and set preferences. VIEW
Slow Scan 3 IconCapture Icon13. Select the slow scan 3 rate and click on the Capture Image icon.    
14. Use the Captured Image menu to choose your image file settings. Save your images once they have been collected in a TIF format. The proper location for your image is D:\Images\users\yourname\. VIEW
Fast Scan 1 IconRun Freeze Icon15. Select the fast scan rate icon. Click on the Freeze/Run icon to return to a live image.    

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